Semicon
Solutions: Low Permeation High Purity PFA
Tubing
With each new
generation of semiconductor products comes
a parallel set of new process concerns.
Going forward, maximizing the productive
life of equipment, reducing down-time and
maximizing yields will be critical and determining
what new solutions are available will be
complex.
The issues:
Non-compliant
tubing and fittings provide places for
entrapment despite flushing the lines
between batches
Degradation
of fittings in the distribution system
Leaching
chemicals can precipitate and impact
processing
Purification
is increasingly important with changes
in the types of chemicals being used
Filtration
requirements are now down to nanometer-scale
sizes
UHP-water
may present issues with batch variations
HCl Permeation
Managing the issues
The
industry has increased its usage
of hydrochloric acid (HCl).
For example, chemical manufacturers
like Koch report increasing production
capacity of HCl by 35% this year
alone. Acids and bases are quintessential
elements of microelectronic fabrication.
Unfortunately, these substances
have some disadvantages. The HCl
molecule permeates tubing, damages
other fluid handling components,
and contaminates processes – all
of which contribute to yield losses.
"Offering custom Teflon®
tubing and Teflon® heat shrinkable tubing
as well as tubing and heat shrink
made from fluoropolymer resins such as PTFE,
FEP, PFA, ETFE, PEEK, and more."
